Åthena Xcellence™ LE series is a self-developed X-ray fluorescence (XRF) technology with high throughput, which offers superior composition measurement of light elements such as B, P, C, O, N, F, etc. The Åthena Xcellence™ LE series enables non-damage thin film composition analysis of various samples, such as BPSG, PSG, FSG, P doped Poly, CHM, etc. Additionally, Åthena Xcellence™ LE series can be...